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1

Effects of Capacitively Coupled Radio Frequency Krypton and Argon Plasmas on Gallium Nitride Etching Damage

Kawakami, Retsuo, Inaoka, Takeshi, Tominaga, Kikuo, Mukai, Takashi

Journal:

Japanese Journal of Applied Physics

Year:

2009

Language:

english

File:

PDF, 232 KB

english, 2009

2

Capacitively coupled radio frequency nitrogen plasma etch damage to N-type gallium nitride

Kawakami, Retsuo, Takeichi, Atsushi, Niibe, Masahito, Konishi, Masashi, Mori, Yuta, Kotaka, Takuya, Inaoka, Takeshi, Tominaga, Kikuo, Mukai, Takashi

Journal:

Year:

2013

Language:

english

File:

PDF, 587 KB

english, 2013

3

Preparation of conductive ZnO:Al films by a facing target system with a strong magnetic field

Kikuo Tominaga, Masahiro Kataoka, Tetsuya Ueda, Munfei Chong, Yoshihiro Shintani, Ichiro Mori

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 412 KB

english, 1994

4

Etching damage and its recovery by soft X-ray irradiation observed in soft X-ray absorption spectra of TiO 2 thin film

Niibe, Masahito, Sano, Keiji, Kotaka, Takuya, Kawakami, Retsuo, Tominaga, Kikuo, Nakano, Yoshitaka

Journal:

Journal of Applied Physics

Year:

2013

Language:

english

File:

PDF, 633 KB

english, 2013

5

The Immunoregulatory Roles of Natural Killer T Cells in Cyclophosphamide-Induced Tolerance

Iwai, Toshiro, Tomita, Yukihiro, Shimizu, Ichiro, Kajiwara, Takashi, Onzuka, Tatsushi, Okano, Shinji, Yasunami, Yohichi, Yoshikai, Yasunobu, Nomoto, Kikuo, Tominaga, Ryuji

Journal:

Transplantation Journal

Year:

2007

Language:

english

File:

PDF, 534 KB

english, 2007

6

Structures and Physical Properties of Films Deposited by Simultaneous DC Sputtering of ZnO and In2O3 or ITO Targets

Toshihiro Moriga, Takashi Okamoto, Kazunori Hiruta, Azumi Fujiwara, Ichiro Nakabayashi, Kikuo Tominaga

Journal:

Journal of Solid State Chemistry

Year:

2000

Language:

english

File:

PDF, 369 KB

english, 2000

7

Cascade collision of Fe-atom caused by low energy He-incidence and effect of temperature to the type of defect

Ichiro Mori, Toshifumi Morimoto, Retsuo Kawakami, Kikuo Tominaga

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

1999

Language:

english

File:

PDF, 183 KB

english, 1999

8

A case of giant mediastinal leiomyoma with long-term survival.

UNO, AKIRA, SAKURAI, MASANORI, ONUMA, KIKUO, YAMANE, YOSHIO, KURITA, KENKICHI, HAYASHI, IZUMI, IKEDA, MICHIAKI, HAGIWARA, NOBORU, TOMINAGA, KUNIHIKO, HAKOZAKI, HANDOU

Journal:

The Tohoku Journal of Experimental Medicine

Year:

1988

Language:

english

File:

PDF, 2.48 MB

english, 1988

9

The properties of transparent conductive In–Ga–Zn oxide films produced by pulsed laser deposition

Kenichi Inoue, Kikuo Tominaga, Takashi Tsuduki, Michio Mikawa, Toshihiro Moriga

Journal:

Year:

2008

Language:

english

File:

PDF, 409 KB

english, 2008

10

AlN Sputtered Film Properties Prepared at Low Gas Pressures by Facing Target System

Tominaga, Kikuo, Imai, Hiroshi, Shirai, Masaki

Journal:

Japanese Journal of Applied Physics

Year:

1991

Language:

english

File:

PDF, 471 KB

english, 1991

11

Effect of nitrogen gas pressure on residual stress in A1N films deposited by the planar magnetron sputtering system

Kazuya Kusaka, Takao Hanabusa, Kikuo Tominaga

Journal:

Thin Solid Films

Year:

1996

Language:

english

File:

PDF, 371 KB

english, 1996

12

Characterization of ZnO–In2O3 transparent conducting films by pulsed laser deposition

Michio Mikawa, Toshihiro Moriga, Yuji Sakakibara, Yukinori Misaki, Kei-ichiro Murai, Ichiro Nakabayashi, Kikuo Tominaga

Journal:

Materials Research Bulletin

Year:

2005

Language:

english

File:

PDF, 230 KB

english, 2005

13

Annealing Effects on Transparent Conducting Properties of Amorphous ZnO-In 2 O 3 Films

Fukushima, Akihiko, Hayashi, Yukako, Kondo, Kumiko, Moriga, Toshihiro, Murai, Kei Ichiro, Nakabayashi, Ichiro, Tominaga, Kikuo

Journal:

International Journal of Modern Physics B

Year:

2003

Language:

english

File:

PDF, 405 KB

english, 2003

14

Damage Analysis of n-GaN Crystal Etched with He and N 2 Plasmas

Niibe, Masahito, Kotaka, Takuya, Kawakami, Retsuo, Nakano, Yoshitaka, Inaoka, Takeshi, Tominaga, Kikuo, Mukai, Takashi

Journal:

Japanese Journal of Applied Physics

Year:

2013

Language:

english

File:

PDF, 183 KB

english, 2013

15

Damage in ZnO Film Preparation by Planar Magnetron Sputtering System with Obliquely Facing Targets of Zn

Tominaga, Kikuo, Sueyoshi, Yasuhiko, Shirai, Masaki, Imai, Hiroshi

Journal:

Japanese Journal of Applied Physics

Year:

1992

Language:

english

File:

PDF, 171 KB

english, 1992

16

Synergy Effect of Particle Radiation and Ultraviolet Radiation from Capacitively Coupled Radio Frequency Argon Plasmas on n-GaN Etching Damage

Kawakami, Retsuo, Inaoka, Takeshi, Tominaga, Kikuo, Kuwahara, Akinobu, Mukai, Takashi

Journal:

Japanese Journal of Applied Physics

Year:

2008

Language:

english

File:

PDF, 618 KB

english, 2008

17

TiN films prepared by unbalanced planar magnetron sputtering under control of photoemission of Ti

Kikuo Tominaga, Shozo Inoue, Ronald P. Howson, Kazuya Kusaka, Takao Hanabusa

Journal:

Thin Solid Films

Year:

1996

Language:

english

File:

PDF, 413 KB

english, 1996

18

Radiation Effect due to Energetic Oxygen Atoms on Conductive Al-Doped ZnO Films

Tominaga, Kikuo, Kuroda, Kenji, Tada, Osamu

Journal:

Japanese Journal of Applied Physics

Year:

1988

File:

PDF, 782 KB

1988

19

Energetic oxygen ions in the reactive sputtering of the Zr target in Ar+O[sub 2] atmosphere

Tominaga, Kikuo, Kikuma, Takuya

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2001

Language:

english

File:

PDF, 335 KB

english, 2001

20

EFFECTS OF Al, Ga-DOPING ON TRANSPARENT CONDUCTING PROPERTIES OF AMORPHOUS ZnO-SnO 2 FILMS

MORIGA, TOSHIHIRO, NISHIMURA, YUSUKE, SUKETA, HIROSHI, MURAI, KEI-ICHIRO, NOGAMI, KAZUHIRO, TOMINAGA, KIKUO, NAKABAYASHI, ICHIRO

Journal:

International Journal of Modern Physics B

Year:

2006

Language:

english

File:

PDF, 364 KB

english, 2006

21

Residual Stress Measurement in Sputtered Copper Thin Films by Synchrotron Radiation and Ordinary X-Rays

Hataya, Mitsuhiko, Hanabusa, Takao, Kusaka, Kazuya, Tominaga, Kikuo, Matsue, Tatsuya, Sakata, Osami

Journal:

Materials Science Forum

Year:

2005

Language:

english

File:

PDF, 273 KB

english, 2005

22

Influence of Target Shape on Properties of AlN Sputtered Film

Tominaga, Kikuo, Sato, Yoshifumi, Mori, Ichiro, Kusaka, Kazuya, Hanabusa, Takao

Journal:

Japanese Journal of Applied Physics

Year:

1998

File:

PDF, 537 KB

1998

23

Effect of Substrate Temperature on Crystal Orientation and Residual Stress in RF Sputtered Gallium Nitride Films

Kusaka, Kazuya, Hanabusa, Takao, Tominaga, Kikuo, Yamauchi, Noriyoshi

Journal:

Materials Science Forum

Year:

2005

Language:

english

File:

PDF, 247 KB

english, 2005

24

An Effective Quantitative Method (Node Count Method) for Evaluation of Endocrine-Disrupting Chemicals Based on Secondary Sexual Characteristics of Medaka (Oryzias latipes)

LIN, Bin-Le, HAGINO, Satoshi, KAGOSHIMA, Michio, ASHIDA, Shouji, IWAMATSU, Takashi, TOKAI, Akihiro, YOSHIDA, Kikuo, YONEZAWA, Yoshitaka, TOMINAGA, Mamoru, NAKANISHI, Junko

Journal:

Journal of Japan Society on Water Environment

Year:

2004

File:

PDF, 737 KB

2004

25

Transparent ZnO:Al films prepared by co-sputtering of ZnO:Al with either a Zn or an Al target

Kikuo Tominaga, Masahiro Kataoka, Haruhiko Manabe, Tetsuya Ueda, Ichiro Mori

Journal:

Thin Solid Films

Year:

1996

Language:

english

File:

PDF, 257 KB

english, 1996

26

Film properties of ZnO:Al prepared by cosputtering of ZnO:Al and either Zn or Al targets

Tominaga, Kikuo

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

1997

Language:

english

File:

PDF, 387 KB

english, 1997

27

ITO films prepared by facing target sputtering system

Kikuo Tominaga, Tetsuya Ueda, Takahiro Ao, Masahiro Kataoka, Ichiro Mori

Journal:

Thin Solid Films

Year:

1996

Language:

english

File:

PDF, 521 KB

english, 1996

28

Properties of anti-liver antibody in sera from patients with liver disease

Hirayama Chisato, Tominaga Kikuo, Koga Shunichi, Toda Takeji, Murai Naoki

Journal:

Clinica Chimica Acta

Year:

1968

Language:

english

File:

PDF, 240 KB

english, 1968

29

The metabolic specificity of the ribonucleic acid released from liver ribosomes by sonic treatment

Sugano, Hiroshi, Ogata, Kikuo, Mirota, Tomi, Tominaga, Hiroshi, Watanabe, Iku

Journal:

Biochimica et Biophysica Acta (BBA) - Specialized Section on Nucleic Acids and Related Subjects

Year:

1962

Language:

english

File:

PDF, 200 KB

english, 1962

30

X-Ray Residual Stress Analysis of Aluminum Nitride Film with c-Axis Orientation on Glass Substrate.

HANABUSA, Takao, TOMINAGA, Kikuo, FUJIWARA, Haruo

Journal:

Journal of the Society of Materials Science Japan

Year:

1993

File:

PDF, 843 KB

1993

31

Etch damage characteristics of TiO2 thin films by capacitively coupled RF Ar plasmas

Retsuo Kawakami, Kikuo Tominaga, Kenji Okada, Takahiro Nouda, Takeshi Inaoka, Atsushi Takeichi, Toshiaki Fukudome, Kenichi Murao

Journal:

Year:

2010

Language:

english

File:

PDF, 886 KB

english, 2010

32

Energetic O - Ions and O Atoms in Planar Magnetron Sputtering of ZnO Target

Tominaga, Kikuo, Sueyoshi, Yasuhiko, Munfei, Chong, Shintani, Yoshihiro

Journal:

Japanese Journal of Applied Physics

Year:

1993

File:

PDF, 767 KB

1993

33

Effects of Cyclosporin A on the Activation of Natural Killer T Cells Induced by ??-Galactosylceramide

Kajiwara, Takashi, Tomita, Yukihiro, Okano, Shinji, Iwai, Toshiro, Yasunami, Youichi, Yoshikai, Yasunobu, Nomoto, Kikuo, Yasui, Hisataka, Tominaga, Ryuji

Journal:

Transplantation Journal

Year:

2007

Language:

english

File:

PDF, 1.28 MB

english, 2007

34

Effect of external magnetic field on c-axis orientation and residual stress in AlN films

Kazuya Kusaka, Takahiro Ao, Takao Hanabusa, Kikuo Tominaga

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 335 KB

english, 1998

35

Surface analysis of n-GaN crystal damaged by RF-plasma-etching with Ar, Kr, and Xe gases

Masahito Niibe, Yoshie Maeda, Retsuo Kawakami, Takeshi Inaoka, Kikuo Tominaga, Takashi Mukai

Journal:

physica status solidi (c)

Year:

2011

Language:

english

File:

PDF, 235 KB

english, 2011

36

Influence of plasma exposure in the preparation of A1N films by facing-target sputtering

Kikuo Tominaga, Hiroshi Imai, Yasuhiko Sueyoshi

Journal:

Surface and Coatings Technology

Year:

1993

Language:

english

File:

PDF, 540 KB

english, 1993

37

In2O3–ZnO transparent conductive oxide film deposition on polycarbonate substrates

Toshihiro Moriga, Koji Shimomura, Daisuke Takada, Hiroshi Suketa, Keisuke Takita, Kei-ichiro Murai, Kikuo Tominaga

Journal:

Year:

2008

Language:

english

File:

PDF, 640 KB

english, 2008

38

Energetic negative ions in titanium oxide deposition by reactive sputtering in Ar/O2

Kikuo Tominaga, Daisuke Ito, Yoshinori Miyamoto

Journal:

Year:

2006

Language:

english

File:

PDF, 220 KB

english, 2006

39

Immunological and chemical analysis of immunoglobulin gin sera from patients with liver cirrhosis

Chisato Hirayama, Kikuo Tominaga

Journal:

Journal of Gastroenterology

Year:

1967

Language:

english

File:

PDF, 67 KB

english, 1967

40

Influence of Energetic Particles on ZnO Films in the Preparation by Planar Magnetron Sputtering with Obliquely Facing Targets

Tominaga, Kikuo, Sueyoshi, Yasuhiko, Imai, Hiroshi, Shirai, Masaki

Journal:

Japanese Journal of Applied Physics

Year:

1992

File:

PDF, 348 KB

1992

41

Energetic Oxygen Atoms in RF Sputtering of ZnO

Tominaga, Kikuo, Yuasa, Takayuki, Kuroda, Kenji, Tada, Osamu

Journal:

Japanese Journal of Applied Physics

Year:

1987

File:

PDF, 611 KB

1987

42

Photoluminescence Study of Damage Introduced in GaN by Ar- and Kr-Plasmas Etching

Nakano, Yoshitaka, Kawakami, Retsuo, Niibe, Masahito, Takeichi, Atsushi, Inaoka, Takeshi, Tominaga, Kikuo

Journal:

MRS Proceedings

Year:

2011

Language:

english

File:

PDF, 852 KB

english, 2011

43

X-Ray Residual Stress Measurment of AlN Films, IV. Residual Stress Measurement in AlN Film Deposited by Alternating Sputtering Method.

KUSAKA, Kazuya, HANABUSA, Takao, TOMINAGA, Kikuo, AO, Takahiro

Journal:

Journal of the Society of Materials Science Japan

Year:

1997

File:

PDF, 1.19 MB

1997

44

Effect of insertion of thin ZnO layer in transparent conductive ZnO:Al film

Kikuo Tominaga, Takakazu Murayama, Ichiro Mori, Tomoko Ushiro, Toshihiro Moriga, Ichiro Nakabayashi

Journal:

Thin Solid Films

Year:

2001

Language:

english

File:

PDF, 136 KB

english, 2001

45

Etch-induced damage characteristics of n-GaN surfaces by capacitively coupled radio frequency He and Ar plasmas

Retsuo Kawakami, Takeshi Inaoka, Kikuo Tominaga, Masahito Niibe, Takashi Mukai, Atsushi Takeichi, Toshiaki Fukudome

Journal:

physica status solidi (c)

Year:

2011

Language:

english

File:

PDF, 292 KB

english, 2011

46

Transparent conductive ZnO:Al films prepared by the planar magnetron sputtering system with obliquely facing targets

Kikuo Tominaga, Yasuhiko Sueyoshi, Hiroshi Imai, Yoshihiro Shintani

Journal:

Surface and Coatings Technology

Year:

1993

Language:

english

File:

PDF, 458 KB

english, 1993

47

Effect of a plasma protection net on residual stress in AlN films deposited by a magnetron sputtering system

Kazuya Kusaka, Takao Hanabusa, Kikuo Tominaga

Journal:

Thin Solid Films

Year:

1996

Language:

english

File:

PDF, 253 KB

english, 1996

48

Effect of Dielectric Barrier Discharge Air Plasma Treatment on TiO 2 Thin Film Surfaces

Kawakami, Retsuo, Niibe, Masahito, Fukudome, Toshiaki, Takeichi, Atsushi, Inaoka, Takeshi, Tominaga, Kikuo

Journal:

Japanese Journal of Applied Physics

Year:

2011

Language:

english

File:

PDF, 349 KB

english, 2011

49

Synergy Effect of Xenon Plasma Ions and Ultraviolet Lights on GaN Etch Surface Damage and Modification

Kawakami, Retsuo, Inaoka, Takeshi, Tominaga, Kikuo, Niibe, Masahito, Mukai, Takashi, Takeichi, Atsushi, Fukudome, Toshiaki

Journal:

Transactions of the Materials Research Society of Japan

Year:

2011

File:

PDF, 2.96 MB

2011

50

Structural Studies of the Immunoglobulins. II. Antigenic and Chemical Properties of γA Myeloma Globulins *

Bernier, George M., Tominaga, Kikuo, Easley, Caroline W., Putnam, Frank W.

Journal:

Year:

1965

Language:

english

File:

PDF, 4.80 MB

english, 1965

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